The present invention relates to an apparatus for measuring the extent of a common path by means of laser interference, which includes: a measurement part for dividing a laser beam into a reference laser beam and a return laser beam so as to produce interference between them used for measuring a moving distance; a laser beam irradiation part for irradiating a measured object with the laser beam generated from the measurement part so as to reflect it therefrom; and a drive part for changing the irradiation position of the laser beam irradiation part.
본 발명은 웨이퍼 캐리어용 복합소재 조성물에 관한 것으로, 보다 상세하게는 웨이퍼 캐리어용 조성물에 있어서, 베이스폴리머에 탄소나노튜브를 포함하여, 충격강도, 인장강도가 우수하고, 높은 전기전도도에 의한 정전기 방지 능력이 향상되며, 내산성 및 내변형성이 뛰어난 웨이퍼 캐리어용 복합소재 조성물에 관한 것이다.patents-wipo patents-wipo