By taking a monocrystalline silicon piece as a mother substrate, the grown silicon film can inherit the crystalline quality of the mother substrate, so that the high crystalline quality of the silicon film is guaranteed; and after the silicon film is stripped, the substrate can be repeatedly used after simple processing, and at the same time, the growth process of the vapour chemical deposition silicon film is simple, thereby being able to effectively reduce production costs of the silicon film.
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