Metadata
Author: patents-wipo
Data
English[en]
Cmp polishing pad with pores formed therein, and method for forming pores
French[fr]
Tampon de polissage cmp dans lequel sont formés des pores, et procédé de formation de pores
Korean[ko]
기공이 형성된 CMP 연마패드 및 기공의 형성방법