Metadata
Author: patents-wipo
Data
English[en]
Disclosed is an electrostatic chuck comprising a buffer layer to absorb thermal stress.
French[fr]
L’invention concerne un mandrin électrostatique comprenant une couche tampon destinée à absorber la contrainte thermique.
Korean[ko]
열응력을 흡수하는 버퍼층을 포함하는 정전 척이 개시된다.