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English

In large CVD(Chemical Vapor Deposition) system (diameter of the reaction chamber is longer than50cm), in order to form a large area and uniform film, using a large area and fence Czochralski tungsten wire to eliminate the uneven temperature and deformation problem of heating wire. But during film growth, large-scale CVD system usually have greater power and gas consumption, and when the arrangement of Czochralski tungsten wire, total current through the hot wire will be great, generally at 100 amperes or more.

Chinese

在大型CVD系统(反应室直径大于50cm)中,为了制备大面积且均匀的膜,采用大面积栅状直拉钨丝以此来消除温度不均匀和加热丝的形变问题。 但是大型CVD系统在膜生长的过程中,一般都有较大的功率和气体消耗,而且直拉热丝排布的时候,通过热丝的总电流都会很大,一般都在100安培以上,需要大功率大电流的热丝加热变压器,和相应的系统冷却装置,设备相对比较复杂,不适合做基础试验的研究。