Metadata
Author: patents-wipo
Data
English[en]
Method of manufacturing micro tunnel-junction circuit and micro tunnel-junction circuit
French[fr]
Procede de fabrication d'un microcircuit a jonction a effet tunnel et microcircuit a jonction a effet tunnel
Japanese[ja]
微小トンネル接合回路の作製方法および微小トンネル接合回路