Metadata
Author: patents-wipo
Data
English[en]
Mems microphone having dual back plate and method for manufacturing same
French[fr]
Microphone de système microélectromécanique (mems) ayant une double plaque arrière et son procédé de fabrication
Korean[ko]
듀얼 백플레이트를 갖는 MEMS 마이크로폰 및 제조방법