Metadata
Author: patents-wipo
Data
English[en]
Method for recycling spent cmp pad conditioner and cmp pad recycled thereby
French[fr]
Procédé de recyclage d'un conditionneur de tissus de polissage cmp usé et tissu de polissage cmp recyclé par ce procédé
Korean[ko]
수명이 종료된 CMP 패드 컨디셔너 재활용방법 및 상기 재활용방법이 수행된 재활용 CMP 패드 컨디셔너