Metadata
Author: patents-wipo
Data
English[en]
Production method for a polysilane-based compound and polysilane-based compounds produced thereby, a dehydrogenation catalyst used therein, and a method for producing an amorphous silicon thin film by using a polysilane-based compound
French[fr]
Procédé de fabrication d'un composé à base de polysilane et composés à base de polysilane fabriqués par ce procédé, catalyseur de déshydrogénation utilisé dans ce procédé et procédé de fabrication d'un film mince de silicium amorphe en utilisant un composé à base de polysilane
Korean[ko]
폴리실란계 화합물의 제조 방법 및 이에 따라 제조되는 폴리실란계 화합물, 이에 이용되는 탈수소화 촉매, 폴리실란계 화합물로 무정형 실리콘 박막을 제조하는 방법