Metadata
Author: patents-wipo
Data
English[en]
Method for manufacturing amorphous alloy film and method for manufacturing nanostructured film comprising nitrogen
French[fr]
Procédé de fabrication d'un film d'alliage amorphe et procédé de fabrication d'un film nano-structuré comportant de l'azote
Korean[ko]
비정질 합금막의 제조방법 및 질소를 포함하는 나노구조막의 제조방법