Metadata
Author: patents-wipo
Data
English[en]
A method for removing a liquid membrane using a high-speed particle beam, according to the present invention, comprises: a wet washing step of washing an object by using a washing solution; and a dry washing step of simultaneously removing the washing solution remaining on the object and pollutants or foreign substances in the washing solution by spraying sublimation particles.
French[fr]
La présente invention concerne un procédé permettant de retirer une membrane liquide au moyen d'un faisceau de particules à haute vitesse, ledit procédé comprenant : une étape de lavage humide consistant à laver un objet au moyen d'une solution de lavage ; et une étape de lavage à sec consistant à retirer simultanément la solution de lavage restant sur l'objet et les polluants ou substances étrangères de la solution de lavage par pulvérisation de particules de sublimation.
Korean[ko]
본 발명에 따른 고속 입자 빔을 이용한 액막 제거 방법은, 세정액을 이용하여 대상물을 씻어내는 습식세정단계 및 승화성 입자를 분사하여 상기 대상물 잔류하는 상기 세정액 및 상기 세정액에 포함된 오염물질 또는 불순물을 동시에 제거하는 건식세정단계를 포함하여 이루어진다.