Besonderhede van voorbeeld: 9197480912010602135

Metadata

Author: patents-wipo

Data

English^[en]

Negative resist composition and method for forming resist pattern

French^[fr]

Composition de reserve negative et procede pour former un modele de reserve

Japanese^[ja]

ネガ型レジスト組成物およびレジストパターン形成方法

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