The present invention relates to a dielectric barrier discharge reacting apparatus for producing disilane, trisilane, and tetrasilane and, more specifically, to a dielectric barrier discharge reacting apparatus for producing disilane, trisilane, and tetrasilane, which is capable of producing not only disilane but also trisilane and tetrasilane from silane in a continuous process, and which comprises therein: a discharge electrode rod connected to a high-frequency apparatus; and a porous tube surrounding the outside of the discharge electrode rod, the reacting apparatus having a high yield as well as being capable of continuously producing disilane, trisilane, and tetrasilane from silane by adjusting the material of the discharge electrode rod, the distance between the discharge electrode rod and porous tube, and the like.
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